
PROGRAMMABLE WAFER SAMPLER
AIS-X00
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Presents Wafers for 65 degree Inspection
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Extra cassette Location for Rejected
Wafers; Side Cassette Loading
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Menu driven Programming for Operator and Maintenance
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Wafers Mapped & Monitored During
Robotic Transfer
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Small Foot Print & Exhaust Ported
Description:
Rapid unload and presentation of wafers on 65 degrees tilt inspection. Keypad
controlled providing both specific, and customized sequences. Unit equipped with
extra cassette location for rejected wafers.
Options:
OCR System for Optical Character
Reading
Stainless Steel Covers
RS232 Communications Port
Specifications:
Pressure: 55 to 65 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz
Vacuum:22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 8"
Dimensions: (4-6") 12.5" W x 24" D x 24" H