Eureka Series

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UKAX25A3
UKAX50A3
UJ2X25A3
USJX00A3
SSSX00A3
BBSX13A3
UKAX13A3

 

All Eureka machines are air logic controlled using technology developed over the last 20 years. These Machines are safe, reliable, and known for their durability. These tools are well accepted in the semiconductor industry. Equipment is available in 100-200mm applications.

Note: X indicates wafer size in machine code. An example would be UKAX25A3, the X could be 4", 6", or 8" wafers. So if you needed a 8" Junior transfer tool the model number would be UKA825A3.

Here are some of the more popular models of the Eureka Series:

UKAX25A3
Eureka Junior- Mass transfer of wafers between one 25 slot plastic cassette, and one 25 slot quartz or sic boat.

UKAX50A3
Eureka Senior- Mass transfer of 50 wafers between two 25 slot plastic cassettes and one 50 slot quartz or sic boat.

UJ2X25A3
Eureka Junior 2-Stage_ Mass transfer of 25 wafers with automatic double indexing platform.

USJX00A3
Eureka Junior/Senior- Mass transfer of 25 Wafers into a proximity back to back configuration between source wafers.

SSSX00A3
Eureka Solid Source- Mass transfer of 25 wafers into a proximity back to back configuration between source wafers.

BBSX13A3
Eureka Back to Back- Transfer of 25 wafers into a contact back to back configuration.

UKAX13A3
Eureka 12/13- Transfer from one 25 slot plastic cassette between two boats, 13 in the first and 12 in the second.