PLUX00

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PROGRAMMABLE WAFER LOADER & UNLOADER
PLU-X00

* Wafers Vacuum Held During Transfer
* Wafer Unload to Self Centering Chuck for Inspection or Loading
    to Another Machine
* Six Programmable Modes:
    Manual, Interval, Series, Random, Load, and Unload
* Small Footprint
* 1-Year Warranty

Description:
Transfers wafers automatically to a self centering chuck for inspection and reload of wafers.

Options:
Bright Light Inspection Unit
Printer
RS232 Communications Port

Specifications:
Pressure: 55 to 65 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz

Vacuum:22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 6"
Dimensions: (4-6") 6" W x 24" D x 17" H