
PROGRAMMABLE WAFER LOADER & UNLOADER
PLU-X00
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Wafers Vacuum Held During Transfer
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Wafer Unload to Self Centering Chuck
for Inspection or Loading
to Another Machine
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Six Programmable Modes:
Manual, Interval, Series, Random, Load, and Unload
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Small Footprint
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1-Year Warranty
Description:
Transfers wafers automatically to a self centering chuck for inspection and
reload of wafers.
Options:
Bright Light Inspection Unit
Printer
RS232 Communications Port
Specifications:
Pressure: 55 to 65 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz
Vacuum:22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 6"
Dimensions: (4-6") 6" W x 24" D x 17" H