
AUTOMATIC
WAFER SORTING SYSTEM
AE1-X00
*
Unloading Accomplished Through Keypad Commands, and may be Programmed for
Specific
or Customized Sequences
*
Sorting & Combining by Two Methods:
Manual, & Pre-Programmed Sort Routines
*
Menu Driven Programming for Operator and Maintenance
*
Wafers Mapped & Monitored During
Robotic Transfer
*
Small Foot Print & Exhaust Ported
Description:
Wafer sorting and stuffing, with one elevator for two cassettes. Includes camera
and monitor.
Options:
OCR System for Optical Character
Reading
Stainless Steel Covers
RS232 Communications Port
SECS II / Gem Interface
Tilt Inspection
Specifications:
Pressure: 55 to 65 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz
Vacuum:22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 8"
Dimensions: (4-6") 12.5" W x 24" D x 24" H