Wafers Mapped & Monitored
While In Cassettes. Vacuum 
Sensed & Monitored during 
robotic transfer.

The operator menu allows wafer
sorting and combining by one of
three methods:
* Manual
* Combination
* Separation

Technician Menu Enables Rapid 
Machine Diagnostics

Wafers Can Be Loaded Into 
Receiver Cassettes In Numerical
Order, Random Order, Or Any
Pre-Selected Sequence.

The lot number and other pertinent 
information will be stored in memory 
and/or downloaded into the fab host
computer through an RS232 port.

Optical Notch Alignment

Small Foot Print & Exhaust Ported


Description: The AR2 is designed for programmable wafer lot build-up and sorting. It consists of two-cassette servo driven elevators, P.C., and video monitor. In the lot build-up mode the two cassettes may be configured to one of several options. Among the options are source, receiver, test, and dummy cassettes.

Options: 
O.C.R System (Optical Character Reading) 
Stainless Steel Covers 
RS 232 Communications 
SECS II/ G.E.M. Interface 
Tilt Inspection