AWM-x00 (Automatic Microscope Loader)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • Grounding:
  • Single Point Low Impedance VAC (provided)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Wafer Size:
  • 4″ (100mm)  thru  8″ (200mm)
  • Weight:
  • ≈ 125 lbs
  • Dimensions (W x D x H:)
  • 26″(66cm) x 29″(73.7cm) x 16″(40.6cm)
  • Warranty:
  • One Year Parts and Labor

Options

  • GEM SECS compatibility

Features & Benefits

  • Exchange arm loads to microscope to maximize throughput.
  • Fully Selectable Macro and Micro Inspection.
  • Gimble controlled tilt and rotate front side macro inspection.
  • Edge grip flip for unobstructed view of backside macro inspect.
  • Automatic wafer return to cassette upon completion of inspection.
  • Ergonomic load station to meet SEMI S8 requirements.
  • Meets FM4910 requirements.
  • Touch Screen Operator Interface with Virtual Instrumentation.
  • Wafers vacuum held during inspection.
  • Notch alignment selectable.
  • Cassette mapping and crossslot detection system.
  • Flexible bright light power point for bright light inspection available