
AUTOMATIC
WAFER SORTING SYSTEM
EV2-X00
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Wafers Mapped & Monitored While in Cassettes. Vacuum Sensed & Monitored During
robotic Transfer.
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The Operator Menu Allows Wafer Sorting
and Combining by one of Five Methods: Manual, Random,
Transfer, Interval, Sort.
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Technician Menu Enables Rapid machine Diagnostics
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Wafers Can be Loaded into Receiver
cassettes in Numerical Order, Random Order, or any
Pre-Selected Sequence.
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Small Foot Print & Exhaust Ported
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Boats are Loaded at Ergonomically Friendly Height and Angle.
Description:
The EV2 is designed for programmable automatic wafer lot build-up and sorting.
It consists of two double servo controlled elevators, a PC and video monitor.
Options:
OCR System for Optical Character
Reading
RS232 Communications Port
SECS 111 Gem Interface
Specifications:
Pressure: 60 to 70 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz
Vacuum: 22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 8"