EV2X00

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AUTOMATIC WAFER SORTING SYSTEM
EV2-X00

* Wafers Mapped & Monitored While in Cassettes. Vacuum Sensed & Monitored During robotic Transfer.
* The Operator Menu Allows Wafer Sorting and Combining by one of Five Methods: Manual, Random,
    Transfer, Interval, Sort.

* Technician Menu Enables Rapid machine Diagnostics
* Wafers Can be Loaded into Receiver cassettes in Numerical Order, Random Order, or any
    Pre-Selected Sequence.
* Small Foot Print & Exhaust Ported
* Boats are Loaded at Ergonomically Friendly Height and Angle.

Description:
The EV2 is designed for programmable automatic wafer lot build-up and sorting. It consists of two double servo controlled elevators, a PC and video monitor.

Options:
OCR System for Optical Character Reading
RS232 Communications Port
SECS 111 Gem Interface

Specifications:
Pressure: 60 to 70 PSI C.D.A. or N2
Power: 110-220 V.A.C. 50-60 hertz

Vacuum: 22" Hg
Exhaust: 1.25" Port Dia.
Wafer Size 4" – 8"