DFL-x00(Furnace Loading)

Specifications

  • Pressure: 60 to 70 PSI C.D.A. or N2
  • Vacuum: 20″ to 25″ Hg
  • Power: 110-220 V.A.C. 50-60 hertz
  • Exhaust: 1.25″ port Dia.
  • Wafer Size:4″, 5″, 6″ & 8″
  • Weight: 450-550 Lbs. Approx.
  • Dimensions: Total System (Approx.) 8′ (W) x 5′ (D) x 7′ (H)

Features & Benefits

  • Automatic Furnace Loader with Wafer Transfer Station.ransfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading of wafers onto furnace.
  • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility. Easy “point and click” teaching with graphical user interface. Extensive diagnostic and error-logging.
  • Includes safety sensors and safeguards to prevent wafer breakage.
  • Cassette Transfer Station can interface with ASYST/SMIF pod loading stations
Quotation