Specifications
- Power:
- 220/110V
- 3 Amp @ 110VAC
- Grounding:
- Single Point Low Impedence VAC (provided)
- CDA/N2:
- 75 to 90 psi
- Vacuum:
- 20″ To 25″ Hg
- Exhaust:
- 1.25″ Diameter port: 5 CFM max (non-process)
- Wafer Size:
- 4″ (100mm) thru 8″ (200mm)
- Weight:
- ≈ 70 Lbs.
- Dimensions (W x D x H):
- 10″ x 14″ x 36″
- Stage width 19.7″
Options
- RS232 communications port
- Recessed mounting
- Vespel package for high temperature applications
- Stainless steel covers
- Hot boat sensor
Features & Benefits
- The Horizon Proximity Back to Back transfers 25 each silicon wafers between one plastic cassette to one quartz or silicon carbide boat in a proximity back-to-back configuration.
- As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
- The Horizon Series V machines are designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.
- Equipped with a rotary platform that automatically rotates 180° for the back-to-back configuration. This eliminates the operator interface to reverse the carrier.
- The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
- All aluminum parts are hard black anodized for corrosion resistance.
- Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
- Lift system uses ramped speed controls for gentle pick-up and landing.
- Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.
- Retainers default to closed position to prevent dropping wafers in the event of a loss of power or a loss of air pressure or both.
- A “Maintenance/Cleaning Mode” is provided to facilitate diagnostics and preventative maintenance.
- The Series V machines have been tested with up to 50,000 volts of electrostatic discharges without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
- Uptime will exceed 99.25%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): less than 1 hour