PBA-x00P5 (Back-to-Back Transfer Machines)

Specifications

  • Power:
  • 220/110V    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • Grounding:
  • Single Point Low Impedence VAC (provided)
  • CDA/N2:
  • 75 to 90 psi
  • Vacuum:
  • 20″ To 25″ Hg
  • Exhaust:
  • 1.25″ Diameter port: 5 CFM max (non-process)
  • Wafer Size:
  • 4″ (100mm) thru 8″ (200mm)
  • Weight:
  • ≈ 70 Lbs.
  • Dimensions (W x D x H):
  • 10″ x 14″ x 36″
  • Stage width 19.7″

Options

  • RS232 communications port
  • Recessed mounting
  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot boat sensor

Features & Benefits

  • The Horizon Proximity Back to Back transfers 25 each silicon wafers between one plastic cassette to one quartz or silicon carbide boat in a proximity back-to-back configuration.
  • As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
  • The Horizon Series V machines are designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.
  • Equipped with a rotary platform that automatically rotates 180° for the back-to-back configuration. This eliminates the operator interface to reverse the carrier.
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • All aluminum parts are hard black anodized for corrosion resistance.
  • Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
  • Lift system uses ramped speed controls for gentle pick-up and landing.
  • Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.
  • Retainers default to closed position to prevent dropping wafers in the event of a loss of power or a loss of air pressure or both.
  • A “Maintenance/Cleaning Mode” is provided to facilitate diagnostics and preventative maintenance.
  • The Series V machines have been tested with up to 50,000 volts of electrostatic discharges without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
  • Uptime will exceed 99.25%.
    • MTBF (mean time between failure): 2,500 hours
    • MTBA (mean time between assist): 1,000 hours
    • MTTR (mean time to repair): less than 1 hour