Linear Series

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L2X25P5
L3X00P5
L2X25E
SRLX00P5

Note: X indicates wafer size in machine code. An example would be UKAX25A3, the X could be 4", 6", or 8" wafers. So if you needed a 8" (200mm) Junior transfer (25 wafer/single density) tool the model number would be UKA825A3.

L2X25P5
Linear 2- Stage- Mass transfer of wafers between one 25 slot plastic cassette, and one 25 slot quartz or sic boat on 2-stage machine.

L3X00P5
Linear 3-Stage - Mass transfer of wafer between two 25 slot plastic cassettes, and one 50 slot plastic, quartz or sic boat on 3-stage machine.

L2X25E
Linear 2- Stage (Electric)- Mass transfer of wafers between one 25 slot plastic cassette, and one 25 slot quartz or sic boat on 2-stage machine. (All Electric)

SRLX00P5
Horizon Sr./ Jr. 3 Stage- Transfer of 25 or 50 wafers with touch panel controls, and ICS ( Intuitive Control System) software, with 3 stage platform.