Note: X
indicates wafer size in machine code. An example would be UKAX25A3, the X could
be 4", 6", or 8" wafers. So if you needed a 8" (200mm) Junior transfer (25
wafer/single density) tool the model number would be UKA825A3.
L2X25P5
Linear 2-
Stage- Mass transfer of wafers between one 25 slot plastic cassette, and one
25 slot quartz or sic boat on 2-stage machine.
L3X00P5
Linear
3-Stage - Mass transfer of wafer between two 25 slot plastic cassettes, and
one 50 slot plastic, quartz or sic boat on 3-stage machine.
L2X25E
Linear 2-
Stage (Electric)- Mass transfer of wafers between one 25 slot plastic
cassette, and one 25 slot quartz or sic boat on 2-stage machine. (All Electric)
SRLX00P5
Horizon
Sr./ Jr. 3 Stage- Transfer of 25 or 50 wafers with touch panel controls, and
ICS ( Intuitive Control System) software, with 3 stage platform.