MCL x25 (MacLite Transfer Machine)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • Grounding:
  • Single Point Low Impedance VAC (provided)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max. (non-process)
  • Wafer Size:
  • 3” (75 mm)  thru  8” (200 mm)
  • Weight:
  • ≈ 50 Lbs.
  • Dimensions (W x D x H):
  • 75mm thru 150mm (3″ thru 6″): 8″ x 14″ x 32″
  • 200mm (8 inch): 10″ x 14.5″ x 32.5″
  • NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.

Options

  • Extended Platform
  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot Wafer/Boat Sensor

Features & Benefits

  • The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
  • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
  • Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds.
  • Operator interface is with a 12 key keypad with a 4 line LCD display.
  • MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrier presence for safety.
  • Flat alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
  • All exposed aluminum parts are hard Black Anodized.
  • Covers are powder covered aircraft grade aluminum.
  • A “Technician Mode” is provided to facilitate preventative maintenance.
  • Uptime will exceed 99.95%.
    • MTBF (mean time between failure): 2,500 hours
    • MTBA (mean time between assist): 1,000 hours
    • MTTR (mean time to repair): 1 hour