Specifications
- Power:
- 220/110VAC 50/60Hz Single Phase
- 3 Amp @ 110VAC
- Grounding:
- Single Point Low Impedance VAC (provided)
- Exhaust:
- 1.25″ Diameter port; 5 CFM max. (non-process)
- Wafer Size:
- 3” (75 mm) thru 8” (200 mm)
- Weight:
- ≈ 50 Lbs.
- Dimensions (W x D x H):
- 75mm thru 150mm (3″ thru 6″): 8″ x 14″ x 32″
- 200mm (8 inch): 10″ x 14.5″ x 32.5″
- NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.
Options
- Extended Platform
- Vespel package for high temperature applications
- Stainless steel covers
- Hot Wafer/Boat Sensor
Features & Benefits
- The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
- As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
- Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds.
- Operator interface is with a 12 key keypad with a 4 line LCD display.
- MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.
- The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
- Single Board PC controlled.
- Sensors detect wafers and cassette or process carrier presence for safety.
- Flat alignment is maintained during transfer.
- Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
- All exposed aluminum parts are hard Black Anodized.
- Covers are powder covered aircraft grade aluminum.
- A “Technician Mode” is provided to facilitate preventative maintenance.
- Uptime will exceed 99.95%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): 1 hour