ML2-x25 (MacLite 2 Stage Moving Platform)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • Grounding:
  • Single Point Low Impedance VAC (provided)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Wafer Size:
  • 3” (75 mm)  thru  8” (200 mm)
  • Weight:
  • ≈ 70 Lbs.
  • Dimensions (W x D x H):
  • 200 mm (8 inch): 17” x 24” x 47”

Options

  • Vespel package for high temperature applications
  • Stainless steel covers.
  • Hot Wafer/Boat Sensor

Features & Benefits

  • The MacLite Junior 2-Stage Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
  • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
  • Fast & Smooth automatic transfer, featuring ramped elevator and platform speeds. One transfer cycle takes less than 45 seconds.
  • Operator interface is with a 12 key keypad and a 4 line LCD display.
  • Stage shifts left and right for safe and easy loading/unloading of cassettes and boats.
  • MacLite machines are completely electronic, with an auto switching power supply to accomodate 110 VAC 60 Hz or 240 VAC 50/60 Hz.
  • Clean operation introduces less than 1.5 particles that are less than .25 micron in diameter, per wafers per transfer.
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrier presence for safety.
  • Flat/Notch alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
  • Pressure sensors are used on the lift system and platform to prevent both personnel and wafer damage during transfer.
  • All exposed aluminum parts are Anodized for corrosion protection.
  • Covers are powder-coated aircraft grade aluminum.
  • All bearings are cleanroom rated.
  • A “Technician Mode” is provided to facilitate preventative maintenance.
  • Uptime will exceed 99.95%.
    • MTBF (mean time between failure): 2,500 hours
    • MTBA (mean time between assist): 1,000 hours
    • MTTR (mean time to repair): 1 hour