PBA-x00P5 (Back-to-Back Transfer Machines)

Specifications

  • Power:
  • 220/110V    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • Grounding:
  • Single Point Low Impedence VAC (provided)
  • CDA/N2:
  • 75 to 90 psi
  • Vacuum:
  • 20″ To 25″ Hg
  • Exhaust:
  • 1.25″ Diameter port: 5 CFM max (non-process)
  • Wafer Size:
  • 4″ (100mm) thru 8″ (200mm)
  • Weight:
  • ≈ 70 Lbs.
  • Dimensions (W x D x H):
  • 10″ x 14″ x 36″
  • Stage width 19.7″

Options

  • RS232 communications port
  • Recessed mounting
  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot boat sensor

Features & Benefits

  • The Horizon Proximity Back to Back transfers 25 each silicon wafers between one plastic cassette to one quartz or silicon carbide boat in a proximity back-to-back configuration.
  • As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accomm...
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PCJ-x00 P5 (Pitch Changing Machine)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • CDA/N2:
  • 70 to 80 psi
  • Grounding:
  • Single Point Low Impedance VAC (provided)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Wafer Size:
  • 4″ (100mm)  thru  8″ (200mm)
  • Weight:
  • ≈ 85 Lbs.
  • Dimensions (W x D x H):
  • 8″ x 15.5″ x 48″
  • NOTE: Optional Extended Platform will add ≈ 6″ to the overall width.

Options

  • Extended Platform
  • RS232 communications port
  • Recessed mounting
  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot boat sensor

Features & Benefits

  • The Horizon Pitch Changer will transfer 25 wafers between one standard pitch plastic cassette to one custom pitch quartz or silicon carbide process boat.
  • As with all Mactronix wafer transfer systems, the Horiz...
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PCB-x00 (Pitch Changing Back-to Back)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • CDA/N2 :
  • 80 to 90 psi
  • Gronding
  • Single Point Low Impedance VAC (provided)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Wafer Size:
  • 4″ (100mm)  thru  6″ (150mm)
  • Weight:
  • ≈ 125 Lbs.
  • Dimensions (W x D x H):
  • 13″ x 21″ x 60″
  • NOTE: Optional Extended Platform will add ≈ 10″ to the overall width.

Options

  • Extended Platform
  • RS232 communications port
  • Recessed mounting
  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot boat sensor

Features & Benefits

  • Transfers 24 to 26 wafers between one standard pitch plastic cassette and one custom process boat in a contact back-to-back configuration.
  • As with all Mactronix wafer transfer systems, the MacLite Series may be conf...
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MBB-x00 (Contact Back-to-Back)

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DFL-x00(Furnace Loading)

Specifications

  • Pressure: 60 to 70 PSI C.D.A. or N2
  • Vacuum: 20″ to 25″ Hg
  • Power: 110-220 V.A.C. 50-60 hertz
  • Exhaust: 1.25″ port Dia.
  • Wafer Size:4″, 5″, 6″ & 8″
  • Weight: 450-550 Lbs. Approx.
  • Dimensions: Total System (Approx.) 8′ (W) x 5′ (D) x 7′ (H)

Features & Benefits

  • Automatic Furnace Loader with Wafer Transfer Station.ransfers from Cassettes into process boats onto furnace cantilever. Safe and Easy loading of wafers onto furnace.
  • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility. Easy “point and click” teaching with graphical user interface. Extensive diagnostic and error-logging.
  • Includes safety sensors and safeguards to prevent wafer breakage.
  • Cassette Transfer Station can interface with ASYST/SMIF pod load...
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Solar Cell Transfer System

Specifications

  • Pressure:
  • Power:
  • Exhaust:
  • Wafer Size:
  • Weight:
  • Dimensions:

Options

Features & Benefits

Quotation
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Solar Cell Furnace Loading

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Optional Features for Solar Cell

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AIS-x00 (Bright Light Inspection Machine)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 3 Amp @ 110VAC
  • CDA/N2
  • 60 to 80 psi
  • Vacuum:
  • 20 to 25″ Hg
  • Wafer Size:
  • 4″ (100mm)  thru  8″ (200mm)
  • Exhaust:
  • 1.25″ Diameter port; 5 CFM max (non-process)
  • Weight:
  • ≈ 75-90 lbs.
  • Dimensions (W x D x H):
  • 12.5″ x 24″ x 24″

Options

  • O.C.R. system for automatic optical character reading
  • Bar code reading
  • RS232 communications link with host computer
  • Custom software packages and SECS II com
  • Light filters available for different light applications

Features & BenefitsThe Automatic Wafer Inspector (AIS) machine presents wafers for light box inspection with the option for rejected wafers to be placed in lower 25-slot cassette.

  • User friendly, menu driven programming for operator and maintenance mode provides complete ...
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PLU-x00 (Programmable Wafer Inspection Station)

  • Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 2 Amp @ 110VAC
  • CDA/N2:
  • 60 to 80 psi
  • Vacuum:
  • 20 to 25" Hg
  • Wafer Size:
  • 4" (100mm)  thru  8" (200mm)
  • Exhaust:
  • 1.25" Diameter port; 5 CFM max (non-process)
  • Weight:
  • ≈ 45 Lbs.
  • Dimensions (W x D x H):
  • 9" x 29" x 20"
  • Options

  • O.C.R. system for automatic optical character reading
  • R.S. 232 communications link with host computer
  • Custom software packages and SECS II com
  • Picture within Picture option available
  • Bright light source
  • Printer for recording defect data
  • Bar code reading
  • Features & Benefits

    • The Mactronix PLU will transfer w...
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