PLU-x00 (Programmable Wafer Inspection Station)

  • Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 2 Amp @ 110VAC
  • CDA/N2:
  • 60 to 80 psi
  • Vacuum:
  • 20 to 25" Hg
  • Wafer Size:
  • 4" (100mm)  thru  8" (200mm)
  • Exhaust:
  • 1.25" Diameter port; 5 CFM max (non-process)
  • Weight:
  • ≈ 45 Lbs.
  • Dimensions (W x D x H):
  • 9" x 29" x 20"
  • Options

  • O.C.R. system for automatic optical character reading
  • R.S. 232 communications link with host computer
  • Custom software packages and SECS II com
  • Picture within Picture option available
  • Bright light source
  • Printer for recording defect data
  • Bar code reading
  • Features & Benefits

    • The Mactronix PLU will transfer wafers one at a time from a 25 slot cassette to a self-centering chuck for visual and/or bright light inspection.
    • User friendly keypad and four-line LCD screen allows for simple menu driven operation.
    • Transfers are be accomplished through keypad commands and may be programmed for customized sequences.
    • Versitile operation allows for six methods of wafer sorting:
    •    Manual        Series        Interval
         Random        Load        Unload

    • The Technician level menu facilitates periodic cleaning and enables step by step machine diagnostics and testing.
    • Wafer detection is achieved via vacuum sensors to inhibit accidental damage during robotic transfer.
    • Space saving small footprint.
    • Exhaust ported for clean room operation; 5 CFM max (non-process).
    • Mactronix standard anti-corrosion package includes black hard anodizing of all aluminum parts.
    • Uptime will exceed 99.25%.
    • Mean time between failure (MTBF): 2,500 hours
    • Mean time between assist (MTBA): 1,000 hours