SWPX00

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SELECTABLE WAFER LIFTER

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Features & Benefits

• The Selectable Wafer Lifter (SWP) is designed to lift one or three wafers at a time (depending on type of machine) from a plastic carrier for safe access to wafers for inspection and lot verification.

• Operation is via a selectable knob for specific wafer(s) and a toggle switch for up/down activation.

• Use for photo, etch, C.V.D. and diffusion inspections.

• Use for wafer lot number identification.

• Front side, back side, and edge condition inspection.

• Patterned surface not contacted by wafer holder.

• Eliminates single wafer handling scratches.

• Positive position location locks for error free operation.

• All pneumatic for simple and reliable operation.

• Available in 3" through 8" models.

• Custom designs available to lift specified wafers.

• All aluminum parts are black hard anodized for corrosion resistance.

• Exhaust ported for clean room operation.

• Uptime will exceed 99.25%.

• MTBF (mean time between failure): 2,500 hours

• MTBA (mean time between assist): 1,000 hours

• MTTR (mean time to repair): 1 hour

Specifications:

Pressure : 60 to 70 PSI C.D.A. or N 2

Weight: 30 Lbs. Approx.

Wafer Sizes: 4", 5", 6" & 8"

Exhaust: 1.25" port Dia.

Dimensions:
base 8.2" (W) x 12.8 "(D) 3.13" (FH) 14.0" (BH)