WLO-x00 (Automatic Wafer Lifter/Inspection Machine)

Specifications

  • Power:
  • 220/110VAC    50/60Hz    Single Phase
  • 2 Amp @ 110VAC
  • Wafer Size:
  • 4" (100mm)  thru  8" (200mm)
  • Exhaust:
  • 1.25" Diameter port; 5 CFM max (non-process)
  • Weight:
  • ≈ 45 Lbs.



  • Options

  • Bar Code Scanning
  • GEM SECS compatibility
  • Stainless steel covers
  • Features & Benefits

    • User friendly Windows® based software
    • Touch screen user interface
    • Automatically aligns wafer flats to a preselected position and raises them in an inclined manner presenting them for viewing by the operator and/or camera.
    • As with all Macronix wafer handling systems, the WLO can accommodate a wide variety of wafer cassettes/carriers.
    • As a convenience, the foot print and weight of the WLO is small enough to be placed near any work environment.
    • Cassette/carrier sensors located in the platform prevent the machine from operating if the required carriers are not present.
    • RS232 communications port.
    • Uptime will exceed 99.25%.
    • MTBF (mean time between failure): 2,500 hours
    • MTBA (mean time between assist): 1,000 hours
    • MTTR (mean time to repair): less than 1 hour